Modell:

A) AIST-NT Inc.–SmartSPM

B) Asylum Research–MFP 3D

Limits:

A) size max. 40 x 50 mm², max. thickness 15 mm, contact, semi-contact, non-contact, phase imaging, lateral force, magnetic force, Kelvin probe, piezo response, nanolithography

B) size max. 80 x 80 mm2, max. thickness 10 mm, scan area max. 90 x 90 µm², contact & non-contact, topography, phase contrast, friction contrast, potential contrast, local conductivity, Kelvin probe, magnetic force, high voltage module, heating / cooling module